9. Nano fabrication

The Nano fabrication theme focuses on developing equipment, processes and technology and how these can contribute to breakthroughs in other NanoNextNL themes.

Nano fabrication is creating and characterising a 2-dimensional or 3-dimensional structure with sub-100 nanometre features in a material of choice. Compared to the nano patterning possibilities of today, the challenge is to build smaller, more accurate, faster and more flexible, for instance by patterning directly in the material of choice. For nano-inspection, challenges include enabling live imaging during actual processes, such as catalysis and pulsed laser deposition, as well as correlative microscopies that combine e.g. electron and optical microscopies and thus merge the strengths of such techniques into a single instrument.

Theme coordinator
Prof. dr. W.J. van der Zande (ASML)

This theme contains the following programmes:

9A Nano-inspection and characterisation
9B Nano patterning

Nano and micro technologies are playing an ever more important role in various products. The application thereof is an essential part of the innovation chain from ‘concept’ to ‘economic activity’. In this, it is almost impossible to design a product without taking fabrication, inspection and characterisation possibilities into account. The nanofabrication theme focuses on developing equipment, processes and technology and how these can contribute to breakthroughs in other themes.

Contact at the programme office for theme 9:  Floor Paauw

https://vimeo.com/channels/staffpicks/140260220